Hightech industry is playing a leading role in promoting industrial upgrading and innovationdriven changes. This paper studies hightech industry of the 11 provinces in Yangtze River Economic Zone as research objects and selects the panel data from 2006 to 2015 aiming to study the cluster of innovation factors and it’s spatial spillover effect by spatial Dubin model. The results show that the unbalanced distribution of innovation factor cluster is obvious.In addition to the input of capital and labor, the innovation factor cluster has the most significant contribution to the development of hightech industry.The spillover effect of innovation factor cluster between the provinces is greater than the spillover effect in the province.