Based on the panel data of hightech industry in 28 provinces and cities of China from 2013 to 2017, the enhanced Russell measurement model was used to measure the technological innovation efficiency of hightech industries, and then the nuclear density estimation method and the Theil index were used to make a systematic analysis. The results show that the comprehensive efficiency of China’s hightech industrial technology innovation activities is at a low level. The pure technical efficiency decreases in the order of eastern, central, western, and northeast, while the scale efficiency decreases in the order of northeast, west, central, and east. The overall distribution density curve of the comprehensive efficiency shifts to the right with time and it has a distinctive right trailing tail and intraregional difference is the main reason for the large total difference in efficiency. There is a statistically significant negative correlation between the pure technical efficiency and the scale efficiency. During the study period, the overall return to scale of technological innovation activities in hightech industries was not good, and the number of regions in which the return to scale was decreasing exceeded 50% every year. According to the results, the corresponding policy recommendations are given.